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Title:
CONTROLLER
Document Type and Number:
Japanese Patent JPH08303630
Kind Code:
A
Abstract:

PURPOSE: To provide a controller which does not vary a flow rate of fluid due the fluctuation of ambient temperature.

CONSTITUTION: A closed space S is set vacuum, which space is formed by a valve rod 3, bellows 29 for sealing fluid inside a valve casing, a fixation part 18 for an actuator 2, bellows 30 for sealing gas inside the actuator 2, and an operation part 19 of the actuator 2.


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Inventors:
OMICHI KUNIHIKO
YOSHIKAWA KAZUHIRO
OGAWA SHUHEI
Application Number:
JP11149795A
Publication Date:
November 22, 1996
Filing Date:
May 10, 1995
Export Citation:
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Assignee:
FUJIKIN KK
International Classes:
F16K31/122; F16K31/126; F16K41/10; F16K51/02; (IPC1-7): F16K31/122; F16K41/10; F16K51/02
Attorney, Agent or Firm:
Eisuke Kishimoto (3 others)



 
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