PURPOSE: To enable the uniform blasting and selective gathering of ionized particles by a construction wherein a pair of parallel electrodes separating selectively a flow of ionized particles are disposed opposite on both sides of a channel on the downstream side of a throttling-expanding nozzle.
CONSTITUTION: A carrier gas containing supplied particles is passed through an exciting device 5 in an upstream chamber 3, excited and ionized thereby, and thereafter it flows into a downstream chamber 4 through a throttling- expanding nozzle 1. An ionized particle beam formed by the throttling-expanding nozzle 1 is limited by a couple of synchronized choppers 7 with respect to the limits of velocity of particles passing through the choppers 7, corresponding to the deviation angles of the respective holes of the two choppers, an aperture between them, etc. When passing through a space between parallel electrodes 8, the ionized particles are separated in accordance with the difference in mass and charge thereof.
SUGATA HIROYUKI
KIMURA TOSHIAKI
KURIHARA NORIKO
DEN TORU
