Title:
CONTROLLING DEVICE FOR MOVEMENT OF SAMPLE
Document Type and Number:
Japanese Patent JPS5814534
Kind Code:
A
Abstract:
PURPOSE:To improve the stopping accuracy of a moving block by measuring beforhand the variance of the speed and stopping position thereof at the time of convergence of a program servo control, by calculating automatically the vector gain of a control loop, and by controlling an actual operation based on the obtained gain. CONSTITUTION:A target position 16 is memorized 17 and a positional error 18 is subjected to DA conversion 19 and given to an error amplifier 20. Meanwhile, the difference 18 is read in by a computer at a fixed interval from a time point of detection 28 of zero, and a speed signal 24 is extracted 29 therefrom, subjected to AD conversion 30 and read in. When a completion signal 26 is generated 25, the difference 28 turns to be a stopping error. According to an instruction delivered after computation 13, the positive and inverse variations 34 and 35 of the gain of the amplifier 20 are memorized temporarily, the direction is discriminated 33 and selected 36, and the feedback resistance 39 of the amplifier is changed. By collecting and computing the state of the oscillation of a control system by means of the computer in this way and by giving a compensated amount of a loop gain to a driving device for a moving block, a frictional for ce different in position and direction can be compensated and the accuracy of a stopping position can be secured automatically, while a time for control can be shortened and thereby the efficiency of production can be improved.
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Inventors:
HAYASHI SOUICHIROU
SATOU SEISHIROU
SATOU SEISHIROU
Application Number:
JP11269781A
Publication Date:
January 27, 1983
Filing Date:
July 17, 1981
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/30; G03F9/00; G05D3/12; H01L21/027; (IPC1-7): H01L21/30
Attorney, Agent or Firm:
Akio Takahashi