Title:
CONVERSION FROM AREA DATA TO PASS DATA
Document Type and Number:
Japanese Patent JPH04215457
Kind Code:
A
Abstract:
PURPOSE: To convert area data having area information about an LSI mask pattern into pass data having information both on a series of center line sections and on width.
CONSTITUTION: Outline data (dotted line in the figure) derived from the profile of area data is converted into pass data (solid line in the figure). The outline data may be divided into two pass data, if necessary. Even if existing layout data is used, it is possible to effectively use a design automation program that limits part of input data to pass data. Therefore, the time required for design can be shortened.
Inventors:
TAKII TAKAAKI
WAKI KAZUYOSHI
HONDA HIROSHI
WAKI KAZUYOSHI
HONDA HIROSHI
Application Number:
JP41090190A
Publication Date:
August 06, 1992
Filing Date:
December 14, 1990
Export Citation:
Assignee:
ROHM CO LTD
International Classes:
H01L21/82; G06F17/50; (IPC1-7): G06F15/60; H01L21/82
Domestic Patent References:
| JPH04167545A | 1992-06-15 |
Attorney, Agent or Firm:
Shizuo Sano