Title:
CONVEYANCE APPARATUS
Document Type and Number:
Japanese Patent JP2015103597
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To reduce a workload resulting from changes in a diameter of a plate-like workpiece to be conveyed, even if such changes occur.SOLUTION: A conveyance apparatus (1) comprises: a first holding mechanism (3) which suction-holds a first plate-like workpiece (W1); a second holding mechanism (4) which suction-holds a second plate-like workpiece (W2); and a moving mechanism (5) to which the first holding mechanism (3) and the second holding mechanism (4) are selectively coupled by a coupling mechanism (6). The moving mechanism (5) can be provided with the first holding mechanism (3) and the second holding mechanism (4) in a movable manner. The first holding mechanism (3) and the second holding mechanism (4) are connected to a suction source (57) via the coupling by the coupling mechanism (6) to the moving mechanism (5).
Inventors:
MIYAMOTO HIROKI
Application Number:
JP2013241673A
Publication Date:
June 04, 2015
Filing Date:
November 22, 2013
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/677; B65G49/07; H01L21/304
Domestic Patent References:
| JP2003077982A | 2003-03-14 | |||
| JP2007149928A | 2007-06-14 | |||
| JPH10151592A | 1998-06-09 | |||
| JPH11207675A | 1999-08-03 | |||
| JP2008251563A | 2008-10-16 | |||
| JPS61205784U | 1986-12-25 |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi
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