Title:
CONVEYANCE BOX AND CONVEYANCE SYSTEM
Document Type and Number:
Japanese Patent JP2012144263
Kind Code:
A
Abstract:
To provide a conveyance box and a conveyance system which can convey a workpiece while suppressing the fluctuation of an atmosphere in a chamber, and has a simple structure.
The conveyance box 1 used to convey the workpiece W from a first processing system 220 to a second processing system 230 in two or more processing systems 200 that process the workpiece W includes an accommodation chamber 4 that accommodates the workpiece W internally, a volume adjusting mechanism that changes the volume of the accommodation chamber 4, and a sealing means 11 that seals the accommodation chamber 4 openably and airtightly.
Inventors:
FUJII HIROAKI
Application Number:
JP2011002395A
Publication Date:
August 02, 2012
Filing Date:
January 07, 2011
Export Citation:
Assignee:
OLYMPUS CORP
International Classes:
B65D21/08; B65D85/38
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Suzuki Mitsuyoshi
Tadao Takashiba
Hiroshi Masui
Masatake Shiga
Suzuki Mitsuyoshi
Tadao Takashiba
Hiroshi Masui
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