Title:
CONVEYANCE SYSTEM
Document Type and Number:
Japanese Patent JP2007335556
Kind Code:
A
Abstract:
To provide a conveyance system capable of efficiently conveying trays by changing a conveyance form according to a request by utilizing the advantages of the trays fully with the trays for storing works one by one as a basic means of conveyance.
The conveyance system comprises: a pod unit conveying means 10 for conveying pods 5 one by one; a pod stacking conveyance means 50 for stacking the plurality of pods 5 in a plurality of stages; a pod stacking conveyance means 60 for conveying the stacked pods 5; and a pod destacking means 50 for destacking the stacked pods.
COPYRIGHT: (C)2008,JPO&INPIT
Inventors:
FUKAZAWA HIROSHI
FUKUSHIMA MASAZUMI
YAMAMOTO MAKOTO
FUKUSHIMA MASAZUMI
YAMAMOTO MAKOTO
Application Number:
JP2006164325A
Publication Date:
December 27, 2007
Filing Date:
June 14, 2006
Export Citation:
Assignee:
MURATA MACHINERY LTD
International Classes:
H01L21/677; B65G49/06; B65G49/07; B65G60/00
Attorney, Agent or Firm:
Takenori Hiroe
Takanobu Takekawa
High Shinichi Ara
Tsutomu Nishio
Takanobu Takekawa
High Shinichi Ara
Tsutomu Nishio