Title:
搬送装置、搬送方法および搬送システム
Document Type and Number:
Japanese Patent JP7279858
Kind Code:
B2
Abstract:
A transport device in a transport chamber having a reduced pressure atmosphere and including a sidewall extending along an arrangement direction. The transport device includes a first robot fixed at a first robot position in the transport chamber and configured to transfer a substrate to and from a first chamber provided outside the transport chamber, and a second robot fixed at a second robot position in the transport chamber and configured to transfer the substrate to and from a second chamber provided outside the transport chamber on the sidewall. Additionally, the transport device includes a mobile buffer configured to hold the substrate and move along a movement locus extending along the arrangement direction and located between the sidewall and each of the first robot position and the second robot position. The movement locus includes a first position for transferring the substrate to and from the first robot and a second position for transferring the substrate to and from the second robot.
Inventors:
Go Yamaguchi
Hiromitsu Akae
Kensuke Ohito
Osamu Komiyaji
Hiromitsu Akae
Kensuke Ohito
Osamu Komiyaji
Application Number:
JP2022524820A
Publication Date:
May 23, 2023
Filing Date:
May 21, 2020
Export Citation:
Assignee:
Yaskawa Electric Co., Ltd.
International Classes:
H01L21/677
Domestic Patent References:
| JP2008510317A | ||||
| JP2014216519A | ||||
| JP2003282669A | ||||
| JP2003197709A | ||||
| JP2014068009A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yasunori Ishizaka
Shigeki Matsuo
Yasunori Ishizaka
Shigeki Matsuo
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