Title:
CONVEYING ARM, CONVEYING DEVICE, AND CONVEYING METHOD
Document Type and Number:
Japanese Patent JP2013212920
Kind Code:
A
Abstract:
To provide a conveying arm, a conveying device, and a conveying method for conveying a substrate while controlling charging by metal contamination and static electricity.
A conveying arm 1 of a substrate 11 includes: a holding part 12, consisting of an insulator, that contacts with and holds the substrate 11; a metal part 13, consisting of a conductor, that is grounded; and a conductive coating 14, consisting of a conductor, that contacts with the substrate 11 and the metal part 13. Moreover, a conductive part 14 is located between the substrate 11 and the grounded part 13 and is fixed by the grounded part 13.
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Inventors:
MINAMINO RYUJI
Application Number:
JP2012084982A
Publication Date:
October 17, 2013
Filing Date:
April 03, 2012
Export Citation:
Assignee:
SHARP KK
International Classes:
B65G49/07; H01L21/677; B25J15/06
Attorney, Agent or Firm:
Kenzo Hara International Patent Office
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