CONVEYING DEVICE FOR DRIVING ARM IN TREATMENT CHAMBER DECOMPRESSED TO VACUUM STATE

Title:

CONVEYING DEVICE FOR DRIVING ARM IN TREATMENT CHAMBER DECOMPRESSED TO VACUUM STATE

Document Type and Number:

Japanese Patent JP2008307682

Kind Code:

A

Abstract:

To provide a compact conveying device having low vibration/low noise and suitable for especially treating a semiconductor wafer and an LCD (Liquid Crystal Display) glass base.

A traction drive reduction gear is constituted of circumscribed axes 20A and 20B connected to output shafts 21A and 21B attached with arms 61A and 61B and arranged coaxially, a plurality of intermediate axes 30A and 30B contactedly arranged on outer peripheries of the circumscribed axes 20A and 20B, and inscribed circular cylinders 40A and 40B inscribed to the outer peripheries of the intermediate axes 30A and 30B. In the traction drive reduction gear, a carrier 10 for rotatably supporting the intermediate axes 30A and 30B is fixed. Driving motors 70A and 70B are connected to the intermediate axes 30A and 30B in each pair via front-stage reduction gears 50A and 50B.

Inventors:

MORI HIROKI
WATANABE TETSUYA
OKUNO CHOHEI

Application Number:

JP2008186718A

Publication Date:

December 25, 2008

Filing Date:

July 18, 2008

Export Citation:

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Assignee:

NABTESCO CORP

International Classes:

B25J17/00; B65G49/06; F16H13/08; H01L21/677

Domestic Patent References:

JPH10277972A	1998-10-20
JPH03153947A	1991-07-01
JPH08226510A	1996-09-03

Attorney, Agent or Firm:

Eiji Sannaka
Motokatsu Sannaka

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