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Title:
CONVEYING DEVICE OF PLATE-LIKE MEMBER
Document Type and Number:
Japanese Patent JP3967648
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To surely convey not only a plate-like member, having no warp but also the plate-like member having warps, and to easily adjust the alignment of a clamp surface between the upper claw and the lower claw to easily replace a clamp plate.
SOLUTION: A conveying device of a plate-like member has an upper claw 10A and a lower claw 10B for conveying a plate-like member 1 by clamping it vertically. The upper claw 10A and the lower claw 10B comprise clamp plates 11A, 11B, composed of an elastic body for clamping the plate-like member 1, and claw-holding plates 11A, 11B and claw abutting plates 11A, 11B arranged so as to interpose the clamp plates 11A, 11B. The clamp plates 11A, 11B and the claw-holding plates 11A, 11B are detachably fixed to the claw-abutting plates 11A, 11B by a bolt 14.


Inventors:
Hiroki Yuki
Kazunori Ota
Shigeru Shiozawa
Application Number:
JP2002248159A
Publication Date:
August 29, 2007
Filing Date:
August 28, 2002
Export Citation:
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Assignee:
Shinkawa Co., Ltd.
International Classes:
H01L21/50; B65G25/04; H01L21/60; (IPC1-7): H01L21/50
Domestic Patent References:
JP5029792A
JP10209186A
JP3073523U
JP2001168166A
Attorney, Agent or Firm:
Yoshinori Tanabe