Title:
Conveying machine
Document Type and Number:
Japanese Patent JP6032348
Kind Code:
B2
Abstract:
A conveyance device for levitating a subject body by a gas and conveying the subject body in a first direction is comprised of a levitation section emitting the gas to apply pressure on the subject body to levitate the subject body; a conveyance section comprising an endless belt elongated in the first direction and a plurality of projections projecting from the belt and capable of coming in contact with the subject body, and being configured to come in contact with and drive the subject body in the first direction; and a suction section elongated adjacent to and in parallel with the conveyance section or aligned with the conveyance section in a single straight line, the suction section applying negative pressure on the subject body to have the subject body in contact with the conveyance section.
Inventors:
Wang Peng
Kengo Matsuo
Yoshiyuki Wada
Kengo Matsuo
Yoshiyuki Wada
Application Number:
JP2015502607A
Publication Date:
November 24, 2016
Filing Date:
February 26, 2013
Export Citation:
Assignee:
Ihi Co., Ltd.
International Classes:
B65G49/06; B65G51/03; H01L21/677
Domestic Patent References:
| JP2005154040A | 2005-06-16 | |||
| JP2008260591A | 2008-10-30 | |||
| JP2006049493A | 2006-02-16 | |||
| JP2005119818A | 2005-05-12 | |||
| JP2008066661A | 2008-03-21 | |||
| JP2010116220A | 2010-05-27 | |||
| JP2004244186A | 2004-09-02 | |||
| JP2011210985A | 2011-10-20 | |||
| JP2011029225A | 2011-02-10 | |||
| JP2005154040A | 2005-06-16 | |||
| JP2008260591A | 2008-10-30 | |||
| JP2006049493A | 2006-02-16 | |||
| JP2005119818A | 2005-05-12 |
Foreign References:
| WO2007088936A1 | 2007-08-09 |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Shunichi Takahashi
Masakazu Ito
Toshio Takamatsu
Iwa Saki Kokuni
Shunichi Takahashi
Masakazu Ito
Toshio Takamatsu