To attain shortening of a lead time of a lot and enhancement of an operation rate of a device by enhancing conveying ability.

A conveying system includes: a conveying rail 1 for conveying an FOUP (front opening unified pod) 4 for storing a semiconductor wafer; an OHT (overhead hoist transport) truck 2 for transferring the FOUP 4 and traveling on the conveying rail 1; and a suspension type temporary storage shelf 3 for temporarily storing the FOUP 4. When the FOUP 4 after completion of treatment by the device 8 for performing the former step is conveyed and when a load port 8c of the device 8 for performing subsequent treatment is emptied, the OHT truck 2 conveys the recovered FOUP 4 to the device 8 for performing the subsequent treatment. When transferring of the FOUP 4 of the OHT truck 2 to the load port 8c is performed, a shelf unit of the suspension type temporary storage shelf 3 is retreated to smoothly perform the treatment. Further, when the load port 8c of the device 8 is not emptied, the OHT truck 2 transfers the FOUP 4 to the suspension type temporary storage shelf 3, waits empty of the load port 8c, and transfers the FOUP 4 to the load port 8c by the shelf unit.

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