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Patent Searching and Data


Title:
CONVEYING TRUCK, TRACK CLEANING METHOD USING THE SAME, TRAVELING STATE INSPECTION METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JP2005334836
Kind Code:
A
Abstract:

To clean a track on which a conveying truck travels or enable to inspect the condition of the track and the traveling state of the conveying truck while operating a conveying system.

The conveying truck 10 is composed of: a bed part 11 on which an object 60 to be conveyed such as a semiconductor wafer-housed FOUP (Front Opening Unified Pod) is loaded; a traveling mechanism part 12 to be driven by a linear motor; wheels 13 to be rotated on the track 30; and a sticky roller 50a having a sticky part on the roller surface. The conveying truck 10 having such a constitution is made to travel on the track 30 by itself so that unnecessary objects such as dust on the track 30 are stuck to the sticky roller 50a and removed while conveying the object 60 to be conveyed.


Inventors:
WATANABE SHINICHI
Application Number:
JP2004160585A
Publication Date:
December 08, 2005
Filing Date:
May 31, 2004
Export Citation:
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Assignee:
RENESAS TECH CORP
International Classes:
B08B1/02; B08B1/04; B61D27/00; H01L21/677; H01L21/68; A47L25/00; (IPC1-7): B08B1/02; A47L25/00; B08B1/04; B61D27/00; H01L21/68
Attorney, Agent or Firm:
Yamato Tsutsui