PURPOSE: To provide a semiconductor device conveyor device capable of suppressing the temperature change of a measured semiconductor device during conveyance so as to enable the execution of inspection in the correctly set state of temperature.
CONSTITUTION: A holding part 1 is provided with a holding part body 10 formed into disc shape, and an attracting part 12 is removably held to the holding part body 10 by a screw 11 formed at the periphery of the holding part body 10. A circular attracting face 13 for attraction-holding a semiconductor device 2 is formed at the lower face of the attracting part 12. A circular recessed part 15 is formed at the lower face of the holding part body 10, and a rubber heater 16 formed into disc shape is disposed therein. The rubber heater 16 is provided with a temperature sensor 17.