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Patent Searching and Data


Title:
CONVEYOR DEVICE FOR SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPH05150001
Kind Code:
A
Abstract:

PURPOSE: To provide a semiconductor device conveyor device capable of suppressing the temperature change of a measured semiconductor device during conveyance so as to enable the execution of inspection in the correctly set state of temperature.

CONSTITUTION: A holding part 1 is provided with a holding part body 10 formed into disc shape, and an attracting part 12 is removably held to the holding part body 10 by a screw 11 formed at the periphery of the holding part body 10. A circular attracting face 13 for attraction-holding a semiconductor device 2 is formed at the lower face of the attracting part 12. A circular recessed part 15 is formed at the lower face of the holding part body 10, and a rubber heater 16 formed into disc shape is disposed therein. The rubber heater 16 is provided with a temperature sensor 17.


Inventors:
NAGASAKA MUNETOSHI
Application Number:
JP11649391A
Publication Date:
June 18, 1993
Filing Date:
May 22, 1991
Export Citation:
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Assignee:
TEL YAMANISHI KK
International Classes:
B25J15/06; G01R31/26; H01L21/66; H01L21/677; H01L21/68; (IPC1-7): B25J15/06; G01R31/26; H01L21/66; H01L21/68
Attorney, Agent or Firm:
Saichi Suyama (1 person outside)