Title:
搬送装置
Document Type and Number:
Japanese Patent JP7202902
Kind Code:
B2
Abstract:
According to one embodiment of the present disclosure, there is provided a transfer apparatus comprising at least one arm configured to support a substrate; at least one gear disposed at a joint that rotatably supports the at least one arm, the at least one gear rotating the at least one arm; and a detector disposed to face the at least one gear and configured to detect a temperature of the at least one gear without contacting the at least one gear.
Inventors:
島▲崎▼ 勝太
Keisuke Kondo
Keisuke Kondo
Application Number:
JP2019007414A
Publication Date:
January 12, 2023
Filing Date:
January 21, 2019
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/677; B25J19/06
Domestic Patent References:
| JP2000042952A | ||||
| JP2012109536A | ||||
| JP2013177975A | ||||
| JP55136920A |
Attorney, Agent or Firm:
Sakai International Patent Office
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