PURPOSE: To obtain a cooling apparatus which can cool a vertical furnace quickly without generating the difference in a temperature-lowering speed between the upper part and the lower part inside the vertical furnace when the vertical furnace is cooled and which can cool the vertical furnace effectively and uniformly irrespective of the position of a wafer.

CONSTITUTION: In the cooling apparatus of a verical furnace, an evacuaiton tube 4 is made to communicate with the upper part of a space 3 which is formed of a reaction tube 1 and of a laeater 2, and an atmosphere gas is sucked and evacuated via the evacuation tube. In the cooling apparatus, cooling nozzles 19, 20 in a required number are inserted and installed, a cooling source 23 is connected to the cooling nozzles, a cooling gas is made to flow into from the cooling nozzles in a cooling operation, and the vertical furnace is cooled rapidly. In addition, a temperature regulator is connected to the heater so as to perform a zone control operation, thermocouples 14, 15, 16, 17 are installed inside the reaction tube, the thermocouples are connected to the temperature regulator, flow-rate controllers 21, 24 are installed at the cooling nozzles, the zone control operation of the heater is performed, or the flow rate of the cooling gas is controlled, and the vertical furnace can be cooled uniformly.