Title:
無寒剤冷却装置
Document Type and Number:
Japanese Patent JP6900369
Kind Code:
B2
Abstract:
The disclosure relates to a cryogen-free cooling apparatus for cooling a sample, comprising a vacuum chamber, a first cooling device which is configured to generate a first temperature in the vacuum chamber to provide a main thermal bath, a second cooling device, which is in connection with a sample stage on which a sample is to be arranged, wherein the second cooling device is a solid state cooler which is configured to provide a second temperature to the sample stage, and wherein the second temperature is different from the first temperature, and a sample loading device which is configured to change the sample while operating the first cooling device and the second cooling device.
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Inventors:
Alexander, Regnate
Yang, Suparek
Christopher, Dubinage
Christian, Pfrayderer
Yang, Suparek
Christopher, Dubinage
Christian, Pfrayderer
Application Number:
JP2018518959A
Publication Date:
July 07, 2021
Filing Date:
October 26, 2016
Export Citation:
Assignee:
kiutra GmbH
International Classes:
F25B21/00; F25B9/00; F25B21/02; F25B25/00; H01L39/04
Domestic Patent References:
| JP2008014878A | ||||
| JP2003532861A | ||||
| JP8097133A | ||||
| JP2005351613A |
Foreign References:
| US20150292782 |
Attorney, Agent or Firm:
Hiroyuki Nagai
Yukitaka Nakamura
Satoru Asakura
Yukitaka Nakamura
Satoru Asakura