Title:
冷却装置、光源装置、露光装置及び物品の製造方法
Document Type and Number:
Japanese Patent JP7202142
Kind Code:
B2
Abstract:
To provide a cooling device advantageous for cooling a heat generator.SOLUTION: A cooling device for cooling a heat generator is provided, which has: a heat receiving unit being thermally connected to the heat generator and transferring heat generated by the heat generator to a working fluid; a heat radiation unit being connected to the heat receiving unit via a conduit line and radiating the heat of the working fluid flowing from the heat receiving unit via the conduit line; a cover member defining a space that houses the heat receiving unit; and a pressure control unit for controlling a pressure of the space in accordance with a target temperature of the heat receiving unit.SELECTED DRAWING: Figure 1
Inventors:
Kentaro in the daytime
Application Number:
JP2018204342A
Publication Date:
January 11, 2023
Filing Date:
October 30, 2018
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/20; F21V29/503; F21V29/57
Domestic Patent References:
| JP2003031481A | ||||
| JP2006019412A | ||||
| JP2010200452A | ||||
| JP2010258404A | ||||
| JP2017156465A | ||||
| JP2018110200A |
Attorney, Agent or Firm:
Patent Attorney Corporation Otsuka International Patent Office
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