Title:
冷却ジャケット及びプラズマ発生装置
Document Type and Number:
Japanese Patent JP7258435
Kind Code:
B2
Abstract:
To provide a cooling jacket capable of improving the cooling efficiency of a plasma generating tube.SOLUTION: The cooling jacket for cooling a plasma generating tube in which a gas that is to be converted into plasma by microwaves flows includes a conductive cylindrical member in contact with the outer peripheral surface of the plasma generating tube. The cylindrical member includes a plurality of slits, formed along a direction of travel of the gas flowing through the plasma generating tube, through which microwaves irradiated from outside the plasma generating tube pass, and a plurality of columnar channels formed along the height direction of the cylindrical member, through which cooling fluid flows.SELECTED DRAWING: Figure 1
Inventors:
Yoshio Watanabe
Kentaro Wada
Fumihiro Ueno
Kentaro Wada
Fumihiro Ueno
Application Number:
JP2019111904A
Publication Date:
April 17, 2023
Filing Date:
June 17, 2019
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H05H1/28; C23C16/511; H01L21/205; H01L21/3065; H01L21/31; H05H1/46
Domestic Patent References:
| JP63070526A | ||||
| JP10284295A | ||||
| JP11135485A | ||||
| JP2002299317A | ||||
| JP2004047172A | ||||
| JP2007048516A | ||||
| JP2013211187A |
Foreign References:
| US20130142964 |
Attorney, Agent or Firm:
Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
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