PURPOSE: To make a manifold small-sized and lightweight and facilitate the assembling work to fix it to a magnetic shield by integrally forming multiple cooling water branch pipelines on an ion source cooling water manifold guiding the cooling water cooling multiple ion sources provided on a neutral particle incident device and guiding the cooling water to the ion sources from individual branch pipelines via connectors.

CONSTITUTION: In an ion source cooling water manifold, two ion sources 1 and 2 are covered by a magnetic shield outer layer 3 and an inner layer 4, holes 3a and 4a to be inserted with the manifold 5 are formed on the layers 3 and 4. The layer 3 is fitted to this manifold 5 with bolts 7 via a flange 6, holes to be fitted with connectors 8 and 9 guiding the cooling water into the manifold 5 are formed on one end of the outside of the manifold 5. Passages 11 are formed on the extension of the holes, the passages 11 are connected to two passages 12 and 13 formed in the manifold 5 nearly at a right angle, cooling water is fed to the ion sources 1 and 2 through connectors 14W17 fitted to opening portions in front of the manifold 5 of the passages 12 and 13.