Title:
COPOLYMER FOR ORGANIC ANTIREFLECTION COATING, MONOMER, AND COMPOSITION INCLUDING THE COPOLYMER
Document Type and Number:
Japanese Patent JP2012229421
Kind Code:
A
Abstract:
To provide a copolymer for an organic antireflection coating exhibiting excellent antireflection coating effect by improving a refractive index and achieving good compatibility with a resist by regulating hydrophilicity and hydrophobicity of a coating film; a monomer; and an organic antireflection coating composition including the copolymer.
The polymer for an organic antireflection coating, the monomer, and the organic antireflection coating composition including the polymer include a repeating unit represented by general formula (1).
Inventors:
LEE JIN HAN
BAE SHIN HYO
HONG SEUNG HEE
HAN EUN HEE
BAE SHIN HYO
HONG SEUNG HEE
HAN EUN HEE
Application Number:
JP2012099777A
Publication Date:
November 22, 2012
Filing Date:
April 25, 2012
Export Citation:
Assignee:
KOREA KUMHO PETROCHEMICAL CO LTD
International Classes:
C08F220/12; C08F220/22; C08F220/26; C08F220/34; G03F7/11; H01L21/027
Domestic Patent References:
| JP2006313347A | 2006-11-16 | |||
| JPS61213213A | 1986-09-22 | |||
| JP2010260987A | 2010-11-18 | |||
| JP2003055408A | 2003-02-26 | |||
| JP2009001792A | 2009-01-08 | |||
| JP2008532059A | 2008-08-14 | |||
| JP2006313347A | 2006-11-16 | |||
| JPS61213213A | 1986-09-22 | |||
| JP2010260987A | 2010-11-18 | |||
| JP2003055408A | 2003-02-26 |
Attorney, Agent or Firm:
Ikeuchi, Sato & Partners