Title:
COPOLYMER PRODUCTION METHOD, AND RESIST COMPOSITION
Document Type and Number:
Japanese Patent JP2014028904
Kind Code:
A
Abstract:
To provide a method of producing a copolymer useful for a resist composition, and a resist composition containing the copolymer.
The copolymer production method comprises: preparing a first solution containing a monomer represented by the general formula (3); preparing a second solution containing a polymerization initiator and a monomer having an ethylenic double bond; heating the first solution; and dripping the second solution into the heated first solution. [In the formula, Ra01 represents a lactone-containing cyclic group, a carbonate-containing cyclic group, or a -SO2- containing cyclic group; and Ra02 represents a C1-C20 alkyl group.]
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Inventors:
IRIE MAKIKO
TSUCHIYA JUNICHI
HORI YOICHI
TSUCHIYA JUNICHI
HORI YOICHI
Application Number:
JP2012170485A
Publication Date:
February 13, 2014
Filing Date:
July 31, 2012
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO LTD
International Classes:
C08F222/14; C08F220/16; G03F7/039; H01L21/027
Domestic Patent References:
JP2000159758A | 2000-06-13 | |||
JP2000159758A | 2000-06-13 | |||
JP2000336121A | 2000-12-05 | |||
JP2004124082A | 2004-04-22 | |||
JP2010250263A | 2010-11-04 | |||
JP2004252405A | 2004-09-09 | |||
JP2008248244A | 2008-10-16 | |||
JP2008239889A | 2008-10-09 | |||
JPH0251514A | 1990-02-21 | |||
JPH06206944A | 1994-07-26 | |||
JP2012224586A | 2012-11-15 |
Foreign References:
WO2011118490A1 | 2011-09-29 |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi