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Title:
COPOLYMER PRODUCTION METHOD, AND RESIST COMPOSITION
Document Type and Number:
Japanese Patent JP2014028904
Kind Code:
A
Abstract:

To provide a method of producing a copolymer useful for a resist composition, and a resist composition containing the copolymer.

The copolymer production method comprises: preparing a first solution containing a monomer represented by the general formula (3); preparing a second solution containing a polymerization initiator and a monomer having an ethylenic double bond; heating the first solution; and dripping the second solution into the heated first solution. [In the formula, Ra01 represents a lactone-containing cyclic group, a carbonate-containing cyclic group, or a -SO2- containing cyclic group; and Ra02 represents a C1-C20 alkyl group.]


Inventors:
IRIE MAKIKO
TSUCHIYA JUNICHI
HORI YOICHI
Application Number:
JP2012170485A
Publication Date:
February 13, 2014
Filing Date:
July 31, 2012
Export Citation:
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Assignee:
TOKYO OHKA KOGYO CO LTD
International Classes:
C08F222/14; C08F220/16; G03F7/039; H01L21/027
Domestic Patent References:
JP2000159758A2000-06-13
JP2000159758A2000-06-13
JP2000336121A2000-12-05
JP2004124082A2004-04-22
JP2010250263A2010-11-04
JP2004252405A2004-09-09
JP2008248244A2008-10-16
JP2008239889A2008-10-09
JPH0251514A1990-02-21
JPH06206944A1994-07-26
JP2012224586A2012-11-15
Foreign References:
WO2011118490A12011-09-29
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi