Title:
レジスト用共重合体およびその製造方法、レジスト組成物ならびにパターン製造方法
Document Type and Number:
Japanese Patent JP4372561
Kind Code:
B2
Inventors:
Yo Momose
Ueda Akifumi
Masayuki Fujiwara
Ueda Akifumi
Masayuki Fujiwara
Application Number:
JP2004002389A
Publication Date:
November 25, 2009
Filing Date:
January 07, 2004
Export Citation:
Assignee:
Mitsubishi Rayon Co., Ltd.
International Classes:
C08F220/28; G03F7/033; C08F2/00; C08F220/10; C08F220/18; C08F220/34; G03F7/039; H01L21/027
Domestic Patent References:
| JP2002351079A | ||||
| JP2002303978A | ||||
| JP2002296783A | ||||
| JP2004176049A | ||||
| JP2004138663A | ||||
| JP2003223001A | ||||
| JP2003302763A | ||||
| JP2004085931A | ||||
| JP2004184636A | ||||
| JP2003222999A |
Foreign References:
| WO2003082933A1 |