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Patent Searching and Data


Title:
Copper or a copper alloy sputtering target
Document Type and Number:
Japanese Patent JP6067927
Kind Code:
B2
Inventors:
Otsuki Tomio
Kenichi Nagata
Takeo Okabe
Application Number:
JP2016511553A
Publication Date:
January 25, 2017
Filing Date:
March 23, 2015
Export Citation:
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Assignee:
JX Nippon Mining & Metals Co., Ltd.
International Classes:
C23C14/34; G01N29/11; H01L21/285
Domestic Patent References:
JPH10330923A1998-12-15
JP2009535518A2009-10-01
JP2013019010A2013-01-31
JP2012156545A2012-08-16
JPH10330923A1998-12-15
JP2009535518A2009-10-01
JP2013019010A2013-01-31
Foreign References:
WO2003064722A12003-08-07
Attorney, Agent or Firm:
Isamu Ogoshi
Ikki Kogoshi



 
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