Title:
銅、モリブデン金属積層膜エッチング液組成物、該組成物を用いたエッチング方法および該組成物の寿命を延ばす方法
Document Type and Number:
Japanese Patent JP6494254
Kind Code:
B2
Abstract:
Provided is an etchant composition for a multilayered metal film comprising both a layer comprising copper and a layer comprising molybdenum, the etchant composition: being capable of etching en bloc a multilayered metal film comprising a layer constituted of copper or an alloy including copper as the main component and a layer constituted of molybdenum or an alloy including molybdenum as the main component; being effective in preventing the molybdenum layer from being undercut; making it easy to regulate the component concentrations so as to accommodate the cross-sectional shape control and cross-section; and being stable. Also provided are a method of etching using the etchant composition and a method for prolonging the life of the etchant composition. The etchant composition according to the present invention is an etchant composition for use in etching en bloc a multilayered metal film comprising a layer constituted of copper or an alloy including copper as the main component and a layer constituted of molybdenum or an alloy including molybdenum as the main component, and comprises hydrogen peroxide, an organic acid, an amine compound, an azole, and a hydrogen peroxide stabilizer (no inorganic acid is contained therein).
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Inventors:
Hideki Takahashi
Takamoto
Lee's trench
Takamoto
Lee's trench
Application Number:
JP2014233913A
Publication Date:
April 03, 2019
Filing Date:
November 18, 2014
Export Citation:
Assignee:
Kanto Chemical Co., Ltd.
International Classes:
C23F1/18; C23F1/26; H01L21/28; H01L21/308; H01L29/41
Domestic Patent References:
| JP2015209568A | ||||
| JP2013543261A | ||||
| JP2006111953A |
Foreign References:
| CN104611700A | ||||
| WO2013015322A1 | ||||
| WO2011099624A1 | ||||
| CN102102206A |
Attorney, Agent or Firm:
Kiyoji Kuzuwa