Title:
倣いプローブ
Document Type and Number:
Japanese Patent JP4330388
Kind Code:
B2
Abstract:
A scanning probe (1, 10) according to the present invention includes a measurement stylus (stylus) (6) movably supported via elastic members (5D, 5E, 5F) on a probe body (4), fine feeders (3, 7) for moving the probe body (4) and the measurement stylus (6) against a workpiece within a fine range, a contacting force detector (5G) for detecting a contacting force between the measurement stylus (6) and a surface of the workpiece, and a contacting force adjuster (8) for adjusting the contacting force by removing the inertial force acting to the measurement stylus (6) because of acceleration from the contacting force. Because of this feature, a measuring force can be adjusted by providing feedback controls to the fine feeders (3, 7), so that the tracking capability is ensured to provide a high response rate and high precision in measurement. Further by eliminating influence of the inertial force of the measurement stylus (6), a measurement error is corrected to obtain a correct measuring force, and high precision measurement can be executed.
Inventors:
Takeshi Yamamoto
Takenori Akaike
Katsuhiko Saegusa
Takenori Akaike
Katsuhiko Saegusa
Application Number:
JP2003202274A
Publication Date:
September 16, 2009
Filing Date:
July 28, 2003
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B5/20; F16F7/10; G01B3/00; G01B5/012; G01B21/00; G01B21/04
Domestic Patent References:
| JP2000074616A | ||||
| JP10197235A | ||||
| JP8043066A | ||||
| JP5010745A |
Attorney, Agent or Firm:
Intellectual Property Office
Kinoshita Minoru
Kanji Nakayama
Tsuyoshi Ishizaki
Kinoshita Minoru
Kanji Nakayama
Tsuyoshi Ishizaki
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