Title:
COPYING PROBE
Document Type and Number:
Japanese Patent JP2587565
Kind Code:
B2
Abstract:
PURPOSE: To provide a copying probe having the capability of performing a high-speed measurement work and a copying work at constant measurement pressure, and also ensuring high detecting accuracy and stability even against a temperature change.
CONSTITUTION: An X-table 5 and a Y-table 7 are supported on a substrate 1 in such a way as capable of displacement in orthogonal directions via parallel leaf springs 4 and 6. Also, an XY table 19 is supported on both of the tables 5 and 7 via parallel leaf springs 17 and 18. In addition, a stylus 22 is provided on the XY table 19, and the substrate 1 is provided with drive sources 13x, 14x, 13y and 14y for causing the displacement of the tables 5 and 7 in respective axial directions. According to this construction, there is no increase in inertial load on the movable side and, therefore, high responsiveness can be ensured as well as high-speed measurement. Furthermore, the drive sources 13x, 14x, 13y and 14y are arranged outside, thereby enabling the heat release effect thereof to be enhanced, and a stable probe to be realized.
Inventors:
NISHIMURA KUNITOSHI
KUWABARA YOSHIHARU
KUWABARA YOSHIHARU
Application Number:
JP13677992A
Publication Date:
March 05, 1997
Filing Date:
May 28, 1992
Export Citation:
Assignee:
MITUTOYO CORP
International Classes:
B23Q35/26; G01B21/00; G01B21/20; (IPC1-7): G01B21/00; B23Q35/26; G01B21/20
Domestic Patent References:
| JP6064206A | ||||
| JP5034849A | ||||
| JP4965857A | ||||
| JP5888604A | ||||
| JP51149050A | ||||
| JP6251206U |
Attorney, Agent or Firm:
Minoru Kinoshita (2 outside)