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Patent Searching and Data


Title:
CORIOLIS MASS FLOW CONTROLLER
Document Type and Number:
Japanese Patent JP2002062175
Kind Code:
A
Abstract:

To provide a Coriolis mass flow controller which has improved a measuring method for tube displacement.

This Coriolis mass flow measuring instrument moves a sensor tube by a driving device, detects the phase difference across the tube due to the movement by an optical detecting circuit, and determines a mass flow rate by using linear variation in the phase difference across the tube with the mass flow rate. This constitution reduce the precision load of the phase shift and improves the sensitivity of the mass flow rate measurement. Further, the displacement can be adjusted by using a flat spring, etc., so flow control becomes possible.


Inventors:
Barger, Michael J.
Dille, Joseph C.
Scott, Timothy W.
Whiteley, Jeffrey L.
Application Number:
JP2001000246999
Publication Date:
February 28, 2002
Filing Date:
August 16, 2001
Export Citation:
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Assignee:
MICRO MOTION INC
International Classes:
G01F1/84; (IPC1-7): G01F1/84