Title:
補正パターン画像生成装置及び補正パターン画像生成方法
Document Type and Number:
Japanese Patent JP4456613
Kind Code:
B2
Inventors:
Mako Sugihara
Application Number:
JP2007067826A
Publication Date:
April 28, 2010
Filing Date:
March 16, 2007
Export Citation:
Assignee:
Advanced Mask Inspection Technology Co., Ltd.
International Classes:
G01B11/24; G01N21/956; G03F1/84; G06T1/00
Domestic Patent References:
| JP2006268396A | ||||
| JP2000241136A | ||||
| JP2006266860A | ||||
| JP2006284617A |
Attorney, Agent or Firm:
Mitsuyuki Matsuyama
Tetsuma Ikegami
Tetsuma Ikegami