To obtain a corrosion resistant ceramic material having high resistance to halogen plasma by using an oxide contg. one or more of the group IIIa elements in the Periodic Table and one or more of the group IVa elements in the Periodic Table as a base.
The ceramic material is based on a multiple oxide contg. one or more of the group IIIa elements in the Periodic Table such as Sc, Y and La and one or more of the group IVa elements in the Periodic Table such as Ti, Zr and Hf, e.g. Y2TiO2 or LaTiO5 and has ≤1.0 μm center line average roughness. A mixture having ≤5 μm particle diameter and ≥98% purity is prepd. by mixing oxide of one or more of the group IIIa elements in the Periodic Table with oxide of one or more of the group IVa elements in the Periodic Table in a prescribed ratio, a sintering auxiliary such as SiO2 is added to the mixture and mixed, and the resultant powdery mixture is molded in a prescribed shape with a uniaxial press or the like, fired at 1,100-1,900°C and subjected to hot isostatic pressing at 900-1,100°C and ≥1,000 kgf/cm2 to obtain the ceramic material.
HAYASAKA HIROTO
OTAKI HIROMICHI
KISHI YUKIO
TAIHEIYO CEMENT CORP
| JPS5260815A | 1977-05-19 | |||
| JPS63252963A | 1988-10-20 | |||
| JPH05330911A | 1993-12-14 | |||
| JPH1045461A | 1998-02-17 |