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Title:
COTTON-LIKE HIGH MELTING POINT METAL, ITS MANUFACTURING METHOD, ELECTRONIC PARTS FORMED THEREOF, AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2001181706
Kind Code:
A
Abstract:

To provide a cotton-like high melting point metal, an oxide thereof, and its manufacturing method in which reaction is achieved with the surface area of the high melting point metal as large as possible when the high melting point metal is mixed with an electronic emitting material as a reducing material, or adhered to a surface of a cathode, and applied electronic parts using the method.

The cotton-like high melting point metal of large porosity is formed by depositing high melting point metal particles in powder or in layer via a cavity. The cotton-like material is obtained by (a) introducing the mixed gas containing oxygen in the inert gas into a reactor, (b) heating the raw high melting point metal in the reactor, and disposing a base facing the raw high melting point metal upward in the perpendicular direction, (c) depositing on the base the particles of the oxide of the raw high melting point metal so that they are connected to each other via a cavity while making the convection upward, and (e) reducing the deposit.


Inventors:
KIMURA CHIKAO
TAMAI HIDEAKI
MIYAMOTO HIROYUKI
SATO TAKASHI
SATO KYOICHI
ONO SHUICHI
ARAI MANABU
MINAMITANI KOJIRO
Application Number:
JP36942699A
Publication Date:
July 03, 2001
Filing Date:
December 27, 1999
Export Citation:
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Assignee:
NEW JAPAN RADIO CO LTD
International Classes:
B22F3/11; B22F3/24; C22C1/08; H01J1/14; H01J1/15; H01J1/20; H01J1/304; H01J9/02; H01J9/04; H01L21/324; (IPC1-7): B22F3/11; C22C1/08; H01J9/02; H01L21/324