Title:
CONTROLLING EQUIPMENT OF POSITIONING OF EXPOSURE APPARATUS
Document Type and Number:
Japanese Patent JP3223542
Kind Code:
B2
Abstract:
PURPOSE: To furnish controlling equipment of positioning of an exposure apparatus which can set an optimum loop gain of a position control system as occasion demands, and can position a stage at a target position accurately in a short time even when mechanical conditions change.
CONSTITUTION: Controlling equipment of positioning of an exposure apparatus is provided with a first calculating means 8 which calculates the average value or the median of the amount of positional slippage in each prescribed time, a second calculating means 9 which calculates a difference between the minimum and maximum values of the amount of positional slippage in each prescribed time and a gain setting means 11 which sets a loop gain of a signal generated for controlling a driving means 3 and corresponding to the amount of positional slippage, on the basis of the average value or the median and the difference which are calculated, and the optimum loop gain is always set irrespective of change in mechanical conditions.
Inventors:
Susumu Makinouchi
Application Number:
JP30971991A
Publication Date:
October 29, 2001
Filing Date:
October 29, 1991
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F9/00; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G03F9/00
Domestic Patent References:
| JP62171016A |
Attorney, Agent or Firm:
Fuyuki Nagai
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