Title:
CrN FILM AND SLIDE MEMBER
Document Type and Number:
Japanese Patent JP2022099748
Kind Code:
A
Abstract:
To provide a CrN film excellent in peel resistance, namely, hardly generating peeling of a film starting a crack, even under an environment having a severer lubrication environment.SOLUTION: In a CrN film, priority orientation by XRD is 200, an X-ray diffraction intensity ratio (200)/(111) of (200) plane to (111) plane is 5.5 or more, and in a distribution of a crystal grain size measured by EBSD analysis, the ratio of crystal grains of 1 μm or less is 85% or more.SELECTED DRAWING: Figure 1
Inventors:
SUGAWARA SHUN
IWASHITA TAKATSUGU
IWASHITA TAKATSUGU
Application Number:
JP2020213722A
Publication Date:
July 05, 2022
Filing Date:
December 23, 2020
Export Citation:
Assignee:
TPR CO LTD
International Classes:
C23C14/06; F16J9/26
Attorney, Agent or Firm:
Hidewa Patent Office
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