Title:
CRACK-DETECTING METHOD FOR SUBSTRATE, CRACK DETECTING APPARATUS THEREFOR, AND SOLAR CELL MODULE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2005142495
Kind Code:
A
Abstract:
To provide a crack-detecting method for a substrate, comprising a simplified equipment and processes.
The crack detecting method for a substrate comprises a step (1) of generating noise by application of a vibration to the substrate, a step (2) of capturing the noise and conducting an acoustic analysis for the same, for determining its power spectrum, and a step (3) of detecting the presence/absence of cracks in the substrate, based on the spectral intensity of a given frequency range.
Inventors:
Yagi, Katsuyuki
Kozai, Hiroshi
Kawagoe, Yoshikazu
Kozai, Hiroshi
Kawagoe, Yoshikazu
Application Number:
JP2003000379995
Publication Date:
June 02, 2005
Filing Date:
November 10, 2003
Export Citation:
Assignee:
SHARP CORP
International Classes:
H01L31/04; G01M7/08; G01N29/04; G01N29/44; G01N29/46; (IPC1-7): H01L31/04
Previous Patent: HIGH-TENSION TRANSFORMER
Next Patent: ELECTROSTATIC CHUCK PROVIDED WITH HEATING MECHANISM
Next Patent: ELECTROSTATIC CHUCK PROVIDED WITH HEATING MECHANISM