To provide a crack inspection method capable of eliminating a determination trouble resulting from a personal error of a worker, and capable of enhancing a yield up to a fixed level or more.
This crack inspection method has an oscillation step for applying a prescribed frequency and a prescribed intensity of vibration to an inspection object, on condition of inspecting that whether a crack is generated in the inspection object having a standardized form or not; a waveform detecting step for detecting a waveform correlated with the vibration of the inspection object under an oscillated condition; a feature amount extracting step for extracting a feature amount correlated with the presence of the crack from the extracted waveform; and a determination step for determining the presence of the crack in the inspection object, based on the comparison of the extracted feature amount with a prescribed reference value.
Inoue, Yuichi
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