高分解能な特徴のパターン形成のための架橋および多相エッチングペースト - Merck Patent Gesellschaft mit beschraenkter Haftung

Title:

高分解能な特徴のパターン形成のための架橋および多相エッチングペースト

Document Type and Number:

Japanese Patent JP2013534944

Kind Code:

A

Abstract:

The present invention relates to a novel etching media in the form of printable, homogeneous etching pastes with non-Newtonian flow properties for the improved etching of inorganic oxides and silicon surfaces and which allow to prepare smaller features.

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Inventors:

Gillies, Jennifer
Krugler, Ralph
Stern, eric
Brian mayers
Royal, patrick
Hunting, Lindsay

Application Number:

JP2013514564A

Publication Date:

September 09, 2013

Filing Date:

May 17, 2011

Export Citation:

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