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Title:
CRUCIBLE FOR EVAPORATION
Document Type and Number:
Japanese Patent JPH0390524
Kind Code:
A
Abstract:

PURPOSE: To generate metal vapor of the amt. stable over a long time in a crucible for evaporation contg. a porous layer to be impregnated and held with a molten metal by boring holes larger than the pores of the porous layer on the surface of this porous layer.

CONSTITUTION: The crucible 10 for evaporation has a crucible body 3 of a recessed shape through cooling water 2 and the porous layer 5 having the recess 4 is housed in this crucible body 3. The plural holes 11 larger than the pores of the porous layer 5 are provided on the surface of this porous layer. The porous layer 5 is impregnated with the metal of the sufficient amt. from the pores included in the wide area and even if the molten metal 12 stagnating on the porous layer 5 evaporates, the metal 12 impregnated in the large amt. is again fed by capillarity to the surface of the porous layer 5. The liquid level of the molten metal 12 on the porous layer 5 is thus prevented from lowering and the metal vapor of the amt. stable over a long time is generated.


Inventors:
KATAGAI TOMONOBU
Application Number:
JP22322889A
Publication Date:
April 16, 1991
Filing Date:
August 31, 1989
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
B01D59/34; B22D45/00; C22B9/02; C22B60/00; C23C14/24; F27B14/10; (IPC1-7): B01D59/34; B22D45/00; C22B9/02; C22B60/00; F27B14/10
Attorney, Agent or Firm:
Hisano Hatano (1 person outside)