To provide a method for manufacturing a thin plate of a material including at least one of a metal material and a semiconducting material in which the substrate is in contact with a molten liquid incorporated into the crucible, to provide a thin plate manufacturing apparatus which can be avoided from permeating the molten liquid into a heat insulating material of the upper of the crucible by flowing the molten liquid due to liquid wobbling of the molten liquid to the outside of the crucible, and the heat insulating properties of the heat insulating material can be maintained uniformly, and to provide a crucible for the apparatus thereof.
The thin plate manufacturing apparatus comprises a crucible 101 having a breakwater structure 106, a heat insulating material 105 which is arranged at a position in an outer peripheral side of the top face of the side wall of the crucible 101 lower than that in an inner peripheral side of the top face of the side wall of the crucible 101, and a substrate carrying means 120, wherein the breakwater structure 106 is in the position of the inner peripheral side of the top face of the side wall of the crucible 101 and an upper edge of the breakwater structure 106 is located in the position upper than that of the upper edge of the heat insulating material 105.
COPYRIGHT: (C)2008,JPO&INPIT
Yuji Yamazaki
| JP4097847U | ||||
| JP62129069U |
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai