Title:
CRUCIBLE WITH COLLAR AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JPH09170882
Kind Code:
A
Abstract:
To prevent the adherence of material scattered from a crucible roundabout to a heater even if it is operated for a long time in a molecular-beam epitaxy and to prevent the trouble due to the creep-up of the material along the inner wall of the crucible.
This crucible with a collar has the collar in such a manner that the outer peripheral end of the collar is bent to the body side. The method for manufacturing the molding of the crucible has the steps of depositing the product by CVD reaction on the mandrel made of graphite, and then separating it from the mandrel, wherein the thermal expansion coefficient of the graphite used for the mandrel is 2 to 4×10-6/°C and the bulk specific gravity is 1.60g/cm3 or more of isotropy.
Inventors:
YANAGISAWA ISAO
IWAI RYOJI
ARAI NOBUO
HIRATA KAZUTO
IWAI RYOJI
ARAI NOBUO
HIRATA KAZUTO
Application Number:
JP34855995A
Publication Date:
June 30, 1997
Filing Date:
December 20, 1995
Export Citation:
Assignee:
SHINETSU CHEMICAL CO
International Classes:
C04B35/565; C23C16/26; C23C16/30; F27B14/04; (IPC1-7): F27B14/04; C04B35/565
Attorney, Agent or Firm:
Mikio Yoshimiya