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Patent Searching and Data


Title:
CRUCIBLE
Document Type and Number:
Japanese Patent JP2007113077
Kind Code:
A
Abstract:

To use up a vapor deposition material maximally in a crucible used in an organic EL apparatus for vapor depositing the vapor deposition material on a substrate under vacuum.

The crucible has a box shape of a rectangular parallelepiped having a length nearly equal to one side of the substrate 10 in the longitudinal direction and is equipped with: a storing part 24 for storing the vapor deposition material at its inside; a heating means for heating the vapor deposition material stored in the storing part 24; and a cap body 26 arranged at the upper surface of the storing part 24 and having blowing-out ports 28 through which the vapor deposition material heated by the heating means to sublimate is blown out. The storing part 24 is partitioned into a plurality of compartments along the longitudinal direction by a plurality of partition walls 30, and each partition wall 30 is arranged apart a distance from the cap body 26 in such a manner that the heights of the partition walls arranged at the peripheral part become lower than those of the partition walls arranged at the central part.


Inventors:
ISHIDA TETSUO
Application Number:
JP2005306449A
Publication Date:
May 10, 2007
Filing Date:
October 20, 2005
Export Citation:
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Assignee:
TOSHIBA MATSUSHITA DISPLAY TEC
International Classes:
C23C14/24; H01L51/50; H05B33/10
Attorney, Agent or Firm:
Tamako Tsutada
Masato Tsuda
Tetsuji Nakamura
Katsuyuki Tomita
Husband