Title:
CRYO-PUMP SYSTEM, AND CONTROL DEVICE AND REPRODUCTION METHOD OF THE SAME
Document Type and Number:
Japanese Patent JP2021156199
Kind Code:
A
Abstract:
To shorten reproduction time of a cryo-pump system.SOLUTION: A cryo-pump system 100 includes: multiple cryo-pumps 10; and a controller 20 for controlling a rough valve 24 of the cryo-pump 10 on the basis of a pressure measured by a pressure sensor 22 of the cryo-pump 10 so that the cryo-pump 10 may be decompressed to a first reference pressure to preserve vacuum by a common rough pump 32, and further decompressed to a second reference pressure being lower than the first reference pressure, about each of the multiple cryo-pumps 10. A controller 20 is configured so as to open the rough valve 24 of one other cryo-pump 10 on the basis of the pressure measured by the pressure sensor 22 of a certain cryo-pump 10 so that one other cryo-pump 10 may be decompressed to the first reference pressure while a certain cryo-pump 10 among multiple cryo-pumps 10 is preserved in vacuum.SELECTED DRAWING: Figure 1
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Inventors:
GOTANDA SHUHEI
TAKAHASHI SO
TAKAHASHI SO
Application Number:
JP2020056300A
Publication Date:
October 07, 2021
Filing Date:
March 26, 2020
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES
International Classes:
F04B37/08; F04B37/16
Attorney, Agent or Firm:
Sakaki Morishita
Tomisho Teruo
Tomisho Teruo