Title:
クライオトラップ
Document Type and Number:
Japanese Patent JP6562503
Kind Code:
B2
Abstract:
According to the present invention, a cryotrap is installed as a low temperature panel cooled by a mechanical refrigerator in a case connected to a chamber which is a degasification space is spaced from a case wall. Moreover, the cryotrap is in contact with a plate surface at one side of the low temperature panel, and at the same time, a cooling separation partition wall is installed to separate the inside of the case into a first space at a chamber side and a second space at a low temperature panel side.
Inventors:
Junichi Yasuda
Yoshinobu Murayama
Hidetoshi Morimoto
Yoshinobu Murayama
Hidetoshi Morimoto
Application Number:
JP2015139978A
Publication Date:
August 21, 2019
Filing Date:
July 13, 2015
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
F26B5/04; F04B37/08; F04B37/16
Domestic Patent References:
| JP2005527366A | ||||
| JP10122143A | ||||
| JP2009019501A |
Attorney, Agent or Firm:
Shu Oikawa
Tomoo Katsumata
Ryo Tsuchiya
Masatake Shiga
Shingo Suzuki
Tomoo Katsumata
Ryo Tsuchiya
Masatake Shiga
Shingo Suzuki