Title:
低温流体の圧送ユニット、低温流体の圧送方法、及び低温流体の圧送ユニットを備えた装置
Document Type and Number:
Japanese Patent JP7237755
Kind Code:
B2
Abstract:
Provided are: a pressure feeding unit for low-temperature fluid, the pressure feeding unit recovering and using the cold energy of a low-temperature fluid before being suctioned into a vacuum pump andthe heat energy of the low-temperature fluid after being discharged from the vacuum pump, thereby eliminating the need for a heater and a cooler as is conventionally required; a pressure feeding method for low-temperature fluid; and a device comprising the pressure feeding unit for low-temperature fluid. A pressure feeding unit 1 for low-temperature fluid pressure feeds a low-temperature fluid and comprises: a low-temperature fluid supply channel 11 that supplies the low-temperature fluid; a heat exchanger 12 that is provided to the low-temperature fluid supply channel 11 and heats the low-temperature fluid; a pressure feeding part 13 that is provided to the low-temperature fluid supply channel 11 downstream of the heat exchanger 12 and pressure feeds the low-temperature fluid heated by the heat exchanger 12; and a delivery channel 14 that delivers, via the heat exchanger 12, the low-temperature fluid that has been pressure-fed from the pressure feeding part 13. The low-temperature fluid is heated in the heat exchanger 12 by means of heat exchange with the low-temperature fluid flowing through the delivery channel 14 after being heated, thereby reaching a temperature range at which the pressure feeding part 13 can suction the low-temperature fluid.
Inventors:
Reona Goda
Takanori Kaikawa
Takanori Kaikawa
Application Number:
JP2019124108A
Publication Date:
March 13, 2023
Filing Date:
July 03, 2019
Export Citation:
Assignee:
Air Water Inc.
International Classes:
F25B9/00
Domestic Patent References:
| JP54021616A | ||||
| JP2005030318A | ||||
| JP5069563U |
Foreign References:
| KR1020170051753A |
Attorney, Agent or Firm:
Patent Attorney Corporation OMNI International Patent Office
Yasushi Koyama
Yasushi Koyama