Title:
CRYOGENIC PUMP
Document Type and Number:
Japanese Patent JPS60128980
Kind Code:
A
Abstract:
PURPOSE: To gauge the pressure at the cryogenic pump side easily with low cost by fixing a vacuum gauge directly on the wall face of cryogenic pump without employing a relay flange fixed with vacuum gauge.
CONSTITUTION: A hole 71 is penetrated through the wall face of pump container 7 to plant a gas flow-in path 72 of vacuum gauge 5 vertically. While a hole 61 is made through the wall face at the position of radiation shield 6 located in front of said path 72 to flow in gas in said shield 6 directly into vacuum gauge 5 thus to gauge the pressure in said shield efficiently by means of vacuum gauge 5. Consequently, relay member can be eliminated resulting in reduction of size and manufacturing cost.
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Inventors:
KIKUCHI TOSHIO
Application Number:
JP23708283A
Publication Date:
July 10, 1985
Filing Date:
December 15, 1983
Export Citation:
Assignee:
ANELVA CORP
International Classes:
F04B37/08; (IPC1-7): F04B37/08
Domestic Patent References:
JP45034911A |
Attorney, Agent or Firm:
Kenji Murakami