PURPOSE: To reduce solidification onto a cryogenic panel and prevent peeling of solidified matter by constructing such that a gas component having high saturation temperature is brought into contact with a low temperature adsorbent prior to solidification then adsorbed and caught.
CONSTITUTION: A cryogenic pump comprises a cryogenic buffle 6 and cryogenic (respectively 70W100K and 10W20K, for example) outside and inside panels 1, 2 coupled to the cold stages 4, 5 at the first and second stages of a helium refrigerating machine 3. Here, a panel 7 adhered with adsorbent in the downstream of the buffle 6 is coupled to the outside cryogenic panel 1. Active carbon, molecular sieve, etc. is employed as said adsorbent in accordance with the gas to be treated. The panel 7 is constructed by supporting a multiple cylinder 15 on a supporting cross frame 14, and then the gas having high boiling point and solidified onto the outer face of the inside panel 2 is absorbed and removed by means of the adsorbent.
AWATA YOSHIHISA
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