To provide a highly practical cryopump and an evacuation method capable of achieving both a high evacuation speed and a low cooling temperature.
The cryopump 10 is provided with a radiation shield 18, cryopanels 24 surrounded by the radiation shield 18 and cooled to a temperature lower than that of the radiation shield 18, and a baffle 23 thermally connected to the radiation shield 18 and arranged at a front stage of the cryopanel 24. A clearance between the inner face of the radiation shield 18 and the baffle 23 is set corresponding to the required evacuation speed of gas to be evacuated by the cryopanel 24, and the baffle 23 is arranged in a position offset from an opening 20 so that a cooling attainment temperature of the cryopanel 24 becomes lower than that when the baffle 23 is arranged in the opening 20. The gas to be evacuated by the cryopanel 24 is evacuated at the required evacuation speed.
| JPS5652587A | 1981-05-11 | |||
| JPH0192591A | 1989-04-11 |
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
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