Title:
クライオポンプ、及びクライオポンプの再生方法
Document Type and Number:
Japanese Patent JP5808691
Kind Code:
B2
Abstract:
A cryopump includes: a first panel to be cooled by a first stage of a refrigerator; a second panel to be cooled by a second stage of the refrigerator; a panel temperature sensor provided with the first panel and/or the second panel; a stage temperature sensor provided with the first stage and/or the second stage; and a control unit that controls vacuum pumping based on the temperature measured by the stage temperature sensor. The control unit controls regeneration including a heating process of a cryopanel, and uses the temperature measured by the panel temperature sensor exclusively in the regeneration. The control unit completes the heating process based on the temperature measured by the panel temperature sensor.
Inventors:
Fukuda Sho
Application Number:
JP2012037239A
Publication Date:
November 10, 2015
Filing Date:
February 23, 2012
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
F04B37/08; F04B37/16
Domestic Patent References:
| JP8135570A | ||||
| JP8061232A | ||||
| JP2095779A |
Attorney, Agent or Firm:
Sakaki Morishita
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo