Title:
クライオポンプ及びその再生方法
Document Type and Number:
Japanese Patent JP5846966
Kind Code:
B2
Abstract:
A method for regenerating a cryopump includes stopping a pressure sensor for the cryopump, starting to heat a cryogenic surface for adsorbing gas molecules, starting the rough evacuation of the cryopump while the pressure sensor is stopped, and terminating the rough evacuation while the pressure sensor is stopped. This method may include activating the pressure sensor after the rough evacuation has been terminated.
Inventors:
Takahashi Run
Application Number:
JP2012045268A
Publication Date:
January 20, 2016
Filing Date:
March 01, 2012
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
F04B37/08; F04B37/16
Domestic Patent References:
| JP11324916A |
Attorney, Agent or Firm:
Sakaki Morishita
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo