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Patent Searching and Data


Title:
CRYOPUMP AND METHOD FOR PREVENTING CROSSOVER HANG-UP THEREOF
Document Type and Number:
Japanese Patent JPH1073077
Kind Code:
A
Abstract:

To effectively prevent a crossover hang-up of a cryopump.

A bottomed cylindrical radiation shield 60 which is coupled to a first heat station 52 so as to surround a second heat station 53 is coated at its outer periphery 60A with a coating of a silicone, epoxy or other system containing any of silicon carbide, silicon dioxide, titanium dioxide, zirconium dioxide and boron nitride as a radiation-absorbing layer 20 which absorbs infrared radiation and far infrared radiation. The infrared radiation that the radiation-absorbing layer 20 absorbs raises the temperature of the radiation shield 60 and holds it at a higher temperature.


Inventors:
MORI MASATAKA
HIREZAKI TAMOTSU
Application Number:
JP22835696A
Publication Date:
March 17, 1998
Filing Date:
August 29, 1996
Export Citation:
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Assignee:
SUZUKI SHOKAN KK
International Classes:
F04B37/08; (IPC1-7): F04B37/08
Attorney, Agent or Firm:
Minoru Kinoshita (1 person outside)